Semiconductor device and method for producing the same

Semiconductor device and method for producing the same

  • CN 1,700,415 A
  • Filed: 05/19/2005
  • Published: 11/23/2005
  • Est. Priority Date: 05/19/2004
  • Status: Active Application
First Claim
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1. a method of making semiconductor device comprises the following steps:

  • On substrate, form silicon wafer nuclear;

    Deposit first amorphous silicon;

    Deposit second amorphous silicon;

    AndBy being grown in the solid phase mode, nucleus makes first amorphous silicon and the second amorphous silicon crystallization.

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