High sensitivity capacitive micromachined ultrasound transducer

High sensitivity capacitive micromachined ultrasound transducer

  • CN 1,714,754 A
  • Filed: 06/30/2005
  • Published: 01/04/2006
  • Est. Priority Date: 06/30/2004
  • Status: Active Application
First Claim
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1. , a kind of ultrasonic sensor unit (10) of capacitive character micromachining comprises:

  • Lower electrode (12);

    With the dividing plate (16) of the adjacent setting of lower electrode (12), make the gap that formation has first gap width between dividing plate (16) and lower electrode (12);

    AndBe formed at least one parts in the gap, wherein these at least one parts are set to have second gap width between dividing plate (16) and lower electrode (12).

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