Method and system for optical inspection of patterned and non-patterned objects

Method and system for optical inspection of patterned and non-patterned objects

  • CN 1,756,950 A
  • Filed: 11/17/2003
  • Published: 04/05/2006
  • Est. Priority Date: 12/30/2002
  • Status: Active Grant
First Claim
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1. , a kind of method of optical check patterned object, this method comprises the following step:

  • The polarisation shift that mensuration is introduced by pattern and will come the polarization of the incident beam of polarisation shift by described pattern;

    In response to described mensuration, set up the polarization state of light beam, so that an incident beam that shines on the patterned object is provided;

    In response to described mensuration, filter a folded light beam by polarization;

    AndDetection in response to described filtered folded light beam produces a detection signal.

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