Apparatus and method for depositing large area coating on explanate surface

Apparatus and method for depositing large area coating on explanate surface

  • CN 1,764,738 B
  • Filed: 02/20/2003
  • Issued: 04/08/2015
  • Est. Priority Date: 02/20/2003
  • Status: Active Grant
First Claim
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1. the equipment (200) for the upper depositing homogeneous coatings (232) of the flat surfaces (234) in substrate (230), described equipment (200) comprising:

  • A) for generation of at least one linear array (210) of the multiple spaced plasma source (212) of multiple plasma body, each of wherein said multiple plasma source (212) comprises the negative electrode (214) be arranged in plasma chamber (202), anode (216) and the entrance (218) for non-reaction and plasma body source gas;

    B) for holding the sediment chamber (204) of described substrate (230), wherein said sediment chamber (204) is communicated with described plasma chamber (202) fluid, and wherein said plasma chamber (202) remains on the first predetermined pressure, described sediment chamber (204) remains on the second predetermined pressure, and described second predetermined pressure is less than described first predetermined pressure;

    AndC) be arranged on for providing at least one common reactant gas injector (220) of at least one reactant gases of even flow rate in each in described multiple plasma body in described sediment chamber (204), this common reactant gas injector (220) comprises structural pipe wall.

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