Illumination system for optical inspection

Illumination system for optical inspection

  • CN 1,771,456 A
  • Filed: 09/08/2003
  • Published: 05/10/2006
  • Est. Priority Date: 09/30/2002
  • Status: Active Application
First Claim
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1. , a kind of device that is used to produce light ray is characterized in that it comprises:

  • Laser instrument, producing one with the work of many swayings mode of oscillation simultaneously is the incoming beams of characteristics with first hot spot contrast;

    AndBe used to mix the optical devices of the cross mode of incoming beams, produce the output beam that has much smaller than second hot spot contrast of first hot spot contrast.

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