Coaxial waveguide microstructures and forming method

Coaxial waveguide microstructures and forming method

  • CN 1,784,807 A
  • Filed: 03/04/2004
  • Published: 06/07/2006
  • Est. Priority Date: 03/04/2003
  • Status: Active Application
First Claim
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1. coaxial waveguide microstructures comprises:

  • Substrate;

    WithBe arranged on described on-chip coaxial waveguide, described coaxial waveguide comprises;

    Center conductor;

    The outer conductor that comprises one or more walls, this outer conductor and center conductor have certain intervals, and are arranged on around the center conductor;

    Be used for supporting one or more insulating support units of center conductor, described support unit contacts with center conductor, is encapsulated within the outer conductor;

    AndCore volume between center conductor and the outer conductor, described core volume is under vacuum or the gaseous state.

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