Media isolated electrostatically actuated valve

Media isolated electrostatically actuated valve

  • CN 1,807,943 A
  • Filed: 12/21/2005
  • Published: 07/26/2006
  • Est. Priority Date: 12/21/2004
  • Status: Active Grant
First Claim
Patent Images

1. , a kind of static valve comprises:

  • Polycrystalline substance;

    Be positioned at the top structure on the described polycrystalline substance;

    Diaphragm between described polycrystalline substance and described top structure;

    Structure for conveying between described polycrystalline substance and described diaphragm;

    Append to first conductor on the described diaphragm;

    AndAppend to second conductor on the described top structure.

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