Positive type resist composition and resist pattern formation method using same

Positive type resist composition and resist pattern formation method using same

  • CN 1,818,784 B
  • Filed: 11/29/2002
  • Issued: 07/04/2012
  • Est. Priority Date: 12/03/2001
  • Status: Active Grant
First Claim
Patent Images

1. eurymeric resist composition;

  • It contains;

    a kind of resin Composition of component (A);

    The resin Composition main chain contains the structural unit that (methyl) acrylic ester is derived;

    Partly having combined to comprise at lateral chain of ester group can be by the many cyclic group acid disassociation, that suppress the group of dissolving, and its solubleness in alkali has increased under the acid effect thus;

    Acidic acid generator component during a kind of exposure of component (B);

    And organic solvent (C);

    WhereinSaid component (A) contains;

    The structural unit that (methyl) acrylic ester is derived, it comprises and contains many cyclic groups that can be dissociated by acid, suppress the group of dissolving;

    The structural unit that (methyl) acrylic ester is derived, it comprises the many cyclic groups that contain hydroxyl;

    AndThat acrylic ester is derived and contain the structural unit and the methacrylate combination that derive and that comprise the structural unit of the monocyclic groups that contains lactone of many cyclic groups of lactone, orIt is that acrylic ester is derived and contain the structural unit and the methacrylate combination that derive and that comprise the structural unit of the many cyclic groups that contain lactone of the monocyclic groups of lactone,The structural unit that methacrylate is derived in the wherein said component (A) with the relative populations of the structural unit that acrylic ester is derived is;

    the molal quantity of the structural unit merging that structural unit of deriving with respect to methacrylate and acrylic ester are derived, and the structural unit that methacrylate is derived accounts for 20~

    80 moles of %;

    And the structural unit that acrylic ester is derived accounts for 20~

    80 moles of %.

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