External exposure device

External exposure device

  • CN 1,841,204 B
  • Filed: 03/28/2006
  • Issued: 12/28/2011
  • Est. Priority Date: 03/28/2005
  • Status: Active Grant
First Claim
Patent Images

1. an external exposure device is characterized in that, corresponding to the peripheral assigned position of exposure object (1), has disposed the peripheral exposure light source (4) that contains the light emitting diode (4a) of launching ultraviolet light;

  • This external exposure device also comprises down array apparatus;

    chilled water generation device (8a) is provided for cooling off the chilled water of light emitting diode (4a);

    Temperature detector (8f) detects the temperature of cooling off light emitting diode chilled water afterwards;

    Water temperature control device, control chilled water generation device (8a) remains on set point of temperature so that just cooled off the temperature of the chilled water behind the light emitting diode;

    Peripheral exposure light source (4) contains a plurality of light emitting diodes (4a) of arranging with the state of the relativeness that keeps regulation, satisfy following condition;

    irradiation area width/{ illumination of resist light sensitivity/UV-LED } 〉

    =film speed overlaps each other the illumination part between the light emitting diode.

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