Vacuum pump

Vacuum pump

  • CN 1,860,301 A
  • Filed: 09/23/2004
  • Published: 11/08/2006
  • Est. Priority Date: 09/30/2003
  • Status: Active Application
First Claim
Patent Images

1. vacuum pump comprises the regeneration pumping mechanism in molecular drag pumping mechanism and its downstream, and wherein the rotor element of molecular drag pumping mechanism is around the rotor element of regeneration pumping mechanism.

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