Light reading out, not refrigerant infrared imaging array device, and fabricating metod

Light reading out, not refrigerant infrared imaging array device, and fabricating metod

  • CN 1,915,796 A
  • Filed: 09/08/2006
  • Published: 02/21/2007
  • Est. Priority Date: 09/08/2006
  • Status: Active Application
First Claim
Patent Images

1. , a kind of light is read the non refrigerating infrared imaging array device, it is characterized in that:

  • 1) forms by (3) a series of pixel cells on the silicon substrate, each pixel cell is by the adiabatic beam (5) of two anchor posts (6), two monolayer materials, and " double-material beam-micro mirror the is integrated " structure (4) of a double layer material and the resonant cavity (7) of an INFRARED ABSORPTION constitute;

    2) anchor post (6) stands on the silicon substrate (3), support pixel cell, article two, adiabatic beam (5) one ends are connected the other end and " double-material beam-micro mirror is integrated " with anchor post (6) " structure (4) is connected, and the gap between pixel cell and the silicon substrate has constituted INFRARED ABSORPTION resonant cavity (7);

    3) described " double-material beam-micro mirror is integrated " structure is that double-material beam and micro-mirror structure are integrated.

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