Interferometric modulators with thin film transistors

Interferometric modulators with thin film transistors

  • CN 1,977,206 A
  • Filed: 06/24/2005
  • Published: 06/06/2007
  • Est. Priority Date: 07/02/2004
  • Status: Active Grant
First Claim
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1. , a kind of manufacturing one has the method for the interferometric modulator of thin film circuit components, and described method comprises:

  • On a transparent substrates, make at least one interferometric modulator;

    On described transparent substrates, make at least one thin film circuit components, wherein said making comprises at least one in deposition semiconductor, metal, oxide or the polymkeric substance, to be formed for the two structure of a thin film circuit components and an interferometric modulator simultaneously.

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