Module integrating MEMS and passive components

Module integrating MEMS and passive components

  • CN 1,980,854 A
  • Filed: 06/23/2005
  • Published: 06/13/2007
  • Est. Priority Date: 06/30/2004
  • Status: Active Application
First Claim
Patent Images

1. , a kind of equipment comprises:

  • The chamber of the hermetic seals between first tube core, second tube core and described first tube core and described second tube core;

    Between described first tube core and described second tube core and around the seal of described chamber circumference;

    Be attached to one or more MEMSs of described first tube core in described chamber, described MEMS is connected with described first tube core by electrical links;

    Be attached to one or more passive elements of described second tube core in described chamber, described passive element is connected with described second tube core by electrical links;

    One or more interconnection in the described chamber are used to make described first tube core to be connected with described second tube core;

    WithOne or more conductive paths with the first end end and second end end, the described first end end of each in the described conductive path is connected with described interconnection, the described second end end can from assembly outside near so that described assembly be connected with the signal media of described assembly outside.

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