For resolving the vacuum cover plate structure of ion source sampling device

For resolving the vacuum cover plate structure of ion source sampling device

  • CN 205,692,798 U
  • Filed: 06/12/2016
  • Issued: 11/16/2016
  • Est. Priority Date: 06/12/2016
  • Status: Active Grant
First Claim
Patent Images

1. the vacuum cover plate structure being used for resolving ion source sampling device, it is characterised in that include cover plate, sample cover plate;

  • Described cover plate includes detecting hole, and sample putting hole, described sample cover plate is movably arranged at described sample putting hole and positionUpper surface in described cover plate;

    There is a groove at the lower surface that described cover plate is corresponding with described sample putting hole, described recess sidewall has through described lidIntralaminar part and the open out vacuum interconnected hole of groove on the sidewall of described cover plate.

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