Silicon wafer outer round surface burnishing device

Silicon wafer outer round surface burnishing device

  • CN 209,110,806 U
  • Filed: 10/18/2018
  • Issued: 07/16/2019
  • Est. Priority Date: 10/18/2018
  • Status: Active Grant
First Claim
Patent Images

1. a kind of silicon wafer outer round surface burnishing device, which is characterized in that thrown including burnishing device ontology, driving assembly and polishingHead;

  • The burnishing device ontology includes the identical circular upper mounting plate of size and circular lower installation board;

    Upper mounting plate is underThe outer rim of mounting plate passes through 6 support columns being evenly distributed and is attached;

    Upper mounting plate upper surface center passes through connecting flangeIt is connect with driving assembly, driving assembly is controlled using variable-frequency motor, is able to achieve the rotation of the forward and reverse of burnishing device;

    Lower peaceLoading board upper surface center is additionally provided with silicon wafer fixation kit, for placing and fixing silicon wafer;

    Vacuum is equipped in silicon wafer fixation kit to inhaleDisk, so that silicon wafer be fixed by vacuum suction;

    Silicon wafer fixation kit connection wire rod, and driven by servo motorIt is dynamic, silicon wafer fixation kit is moved reciprocatingly in the vertical direction;

    The polishing ramming head includes ramming head under 4 lateral ramming heads, 4 upthrow ramming heads and 4, is staggeredly evenly arranged in polishingDevice noumenon outer rim;

    The transverse direction ramming head, including swing rod mounting blocks;

    Two of them swing rod mounting blocks are fixedly arranged on upper mounting plate outer rim, two swing rodsMounting blocks are fixedly arranged on lower installation board outer rim, and swing rod mounting blocks are interior to connect a swing rod by pivot pin, and swing rod can be relative to vertical sideIt is swung to two sides;

    The top and bottom of swing rod are respectively equipped with clump weight and poliss;

    Divide on swing rod mounting blocks upper and lower end faceIt She You not upper limit position block and lower position block;

    The upthrow ramming head, including swing rod mounting blocks;

    Swing rod mounting blocks are fixedly arranged on upper mounting plate outer rim, pass through in swing rod mounting blocksPivot pin connects a swing rod, and swing rod can be swung relative to vertical direction two sides;

    The top and bottom of swing rod are respectively equipped with throwingLight block and clump weight;

    Swing rod mounting blocks are respectively equipped with lower position block and upper limit position block on upper and lower end face;

    The lower throwing ramming head, including swing rod mounting blocks;

    Swing rod mounting blocks are fixedly arranged on lower installation board outer rim, pass through in swing rod mounting blocksPivot pin connects a swing rod, and swing rod can be swung relative to vertical direction two sides;

    The top and bottom of swing rod, which are respectively equipped with, matchesPouring weight and poliss;

    Swing rod mounting blocks are respectively equipped with upper limit position block and lower position block on upper and lower end face;

    Polishing cloth is equipped on the poliss.

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