Microphone

Microphone

  • CN 211,959,452 U
  • Filed: 05/19/2020
  • Issued: 11/17/2020
  • Est. Priority Date: 05/19/2020
  • Status: Active Grant
First Claim
Patent Images

1. A microphone, comprising:

  • a substrate (100) having a back cavity (101) formed in the middle thereof;

    the first sacrificial layer (200) is formed on the substrate (100), and a first hollow area communicated with the back cavity (101) is formed in the middle of the first sacrificial layer (200) and at a position corresponding to the back cavity (101);

    the vibrating diaphragm (300) is formed on the first sacrificial layer (200), and the middle part of the vibrating diaphragm (300) is arranged on the first hollow area in a suspended mode;

    the second sacrificial layer (400) is formed on the diaphragm (300), the edge of the diaphragm (300) is clamped between the second sacrificial layer (400) and the first sacrificial layer (200), a second hollow area communicated with the back cavity (101) is formed in the middle of the second sacrificial layer (400) at a position corresponding to the back cavity (101), and a second release boundary (401) of the second hollow area is positioned outside a first release boundary (201) of the first hollow area;

    a back plate (500) formed on the second sacrificial layer (400), the back plate (500) having a plurality of sound holes (501) disposed thereon.

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