Multi-functional ion-bombardment furnace

Multi-functional ion-bombardment furnace

  • CN 2,163,814 Y
  • Filed: 05/20/1993
  • Issued: 05/04/1994
  • Est. Priority Date: 05/20/1993
  • Status: Active Grant
First Claim
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1. , a kind of multifunction ion bombarding furnace with double-deck glow, it comprises the vacuum chamber of being made up of bell jar and base [9], first negative electrode of being made up of worktable [5] and workpiece [4] is set in the vacuum chamber, anode [7], thermal insulation layer [8], the first adjustable direct supply [11], it is characterized in that being provided with second negative electrode [3] in the anode inner side negative electrode outside, also be provided with the second adjustable direct supply [10] simultaneously, and the positive pole of all right one way or the other straightening stream power supply [10], [11] is connected to anode altogether, and its negative pole joins with second negative electrode and first negative electrode respectively.

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