Overhead manufacturing, processing and storage system
First Claim
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1. A substrate processing system comprising:
- a storage system for storing a plurality of substrates;
a processing system for performing at least one action on the plurality of substrates;
a loading system for loading and unloading the plurality of substrates to and from the storage system and the processing system; and
a transportation system for transporting the substrates between the storage system, the processing system, and the loading system;
whereineach of the storage system, the processing system, the loading system, and the transportation system is ceiling mounted.
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Abstract
This disclosure relates generally to substrate and manufacturing system, processes and methods. In one example embodiment, to methods, apparatus, and systems which provides improved substrate processing and manufacturing wherein at least a portion of the system, apparatus or method may be in an overhead system, such as attached to a ceiling or overhead mounts, such that floor space and other efficiencies may be founded.
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Citations
16 Claims
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1. A substrate processing system comprising:
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a storage system for storing a plurality of substrates; a processing system for performing at least one action on the plurality of substrates; a loading system for loading and unloading the plurality of substrates to and from the storage system and the processing system; and a transportation system for transporting the substrates between the storage system, the processing system, and the loading system;
whereineach of the storage system, the processing system, the loading system, and the transportation system is ceiling mounted. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A substrate processing system comprising:
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a low density container; and a high density container that holds substrates at a higher density than the low density container; a storage system for storing a plurality of substrates; a processing system for performing at least one action on the plurality of substrates; a loading system for loading and unloading the plurality of substrates to and from the storage system and the processing system; and a transportation system for transporting the substrates between the storage system, the processing system, and the loading system;
whereineach of the storage system, the processing system, the loading system, and the transportation system is ceiling mounted. - View Dependent Claims (15, 16)
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Specification