Low variability robot
First Claim
Patent Images
1. An apparatus comprising:
- a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon;
a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other, where the first position sensor comprises an encoder directly coupled to one of the two members, where an airtight enclosure is provided on the movable arm, and where the first position sensor is sealed, at least partially, in the airtight enclosure;
a drive connected to a first one of the links of the frame by a connection, where the drive is configured to move the movable arm;
a chamber, where the frame is located in the chamber and the drive extends through a wall in the chamber; and
a heat transfer system configured to transfer heat from the first position sensor on the frame to outside of the chamber, where the heat transfer system comprises a portion in a second one of the links at the first joint, where the portion of the heat transfer system is spaced from the connection of the first link with the drive.
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Abstract
An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber.
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Citations
32 Claims
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1. An apparatus comprising:
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a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other, where the first position sensor comprises an encoder directly coupled to one of the two members, where an airtight enclosure is provided on the movable arm, and where the first position sensor is sealed, at least partially, in the airtight enclosure; a drive connected to a first one of the links of the frame by a connection, where the drive is configured to move the movable arm; a chamber, where the frame is located in the chamber and the drive extends through a wall in the chamber; and a heat transfer system configured to transfer heat from the first position sensor on the frame to outside of the chamber, where the heat transfer system comprises a portion in a second one of the links at the first joint, where the portion of the heat transfer system is spaced from the connection of the first link with the drive. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 28, 29, 30, 31, 32)
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13. An apparatus comprising:
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a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other; a drive connected to a first one of the links of the frame by a connection, where the drive is configured to move the movable arm; a chamber, where the frame is located in the chamber and the drive extends through a wall in the chamber; and a heat transfer system configured to transfer heat out of the chamber from the first position sensor on the movable arm to a spaced distance from the movable arm, where the heat transfer system comprises a first heat transfer member connected to a first member of the drive and a second heat transfer member, where the second heat transfer member is located relative to the first heat transfer member to receive heat therefrom, where the first heat transfer member and/or the second heat transfer member comprises a thermoelectric cooler at the drive, and where the first heat transfer member is moveable relative to the second heat transfer member as the first member of the drive is moved, where the heat transfer system comprises a portion in a second one of the links at the first joint, where the portion of the heat transfer system is spaced from the connection of the first link with the drive.
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18. An apparatus comprising:
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an electrical device; an airtight enclosure, where the electrical device is inside the airtight enclosure; a frame having the airtight enclosure with the electrical device thereon, where the frame comprises at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a chamber, where the frame is located in the chamber; a drive connected to a first one of the links of the movable arm by a connection, where the drive is configured to move the movable arm; and a heat transfer system configured to transfer heat out of the chamber from the electrical device on the movable arm to a spaced distance from the movable arm, where the heat transfer system comprises a portion in a second one of the links at a first one of the joints, where the portion of the heat transfer system is spaced from the connection of the first link with the drive, where the heat transfer system comprises a first heat transfer member connected to a first member of the drive and a second heat transfer member, where the second heat transfer member is located relative to the first heat transfer member to receive heat therefrom, where the first heat transfer member and/or the second heat transfer member comprises a thermoelectric cooler at the drive, and where the first heat transfer member is moveable relative to the second heat transfer member as the first member of the drive is moved. - View Dependent Claims (19, 20, 21)
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22. An apparatus comprising:
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a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a first position sensor on the movable arm proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other, where the first position sensor comprises an encoder directly coupled to one of the two members; and a communications link connected to the first position sensor, where the communications link is configured to transmit signals from the first position sensor on the movable arm to a device spaced from the movable arm through an airtight enclosure, where the airtight enclosure is on the movable arm, where the airtight enclosure moves with the movable arm, and where the airtight enclosure surrounds the first position sensor. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification