Continuous processing of thin-film batteries and like devices
First Claim
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1. A method for making a thin-film device, the method comprising:
- providing a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area;
depositing second layer onto the first layer, wherein the depositing of the second layer includes energizing the second layer without substantially heating the substrate.
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Abstract
A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate'"'"'s major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
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Citations
31 Claims
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1. A method for making a thin-film device, the method comprising:
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providing a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area;
depositing second layer onto the first layer, wherein the depositing of the second layer includes energizing the second layer without substantially heating the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area;
a deposition station that deposits a second layer onto the first layer, wherein the deposition station supplies energy to the second layer to aid in layer formation without substantially heating the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area;
means for depositing a second layer onto the first layer, wherein the means supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
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22. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area;
a plurality of deposition stations that deposit layers onto the substrate, wherein the deposition station supplies energy to the layer to aid in layer formation without substantially heating the substrate. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification