Low-temperature fabrication of thin-film energy-storage devices
First Claim
1. A method of fabricating a solid-state energy-storage device, comprising:
- providing a substrate;
depositing a first layer on the substrate by;
(a) depositing a first material to a location on the substrate, and (b) supplying an energized second material different than the first material towards the substrate adjacent the location to control growth of the first material at the location;
forming an electrolyte second layer on the first layer; and
forming a third layer on the second layer.
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Accused Products
Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of film. For lithium-ion energy-storage devices, the first material is an intercalation material, which releasably stores lithium ions therein. Supercapacitors and energy-conversion devices are also fabricated according the methods.
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Citations
107 Claims
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1. A method of fabricating a solid-state energy-storage device, comprising:
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providing a substrate;
depositing a first layer on the substrate by;
(a) depositing a first material to a location on the substrate, and (b) supplying an energized second material different than the first material towards the substrate adjacent the location to control growth of the first material at the location;
forming an electrolyte second layer on the first layer; and
forming a third layer on the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A method of fabricating a thin-film, rechargeable lithium battery, comprising:
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providing a substrate having a thermal degradation temperature of less than 700 degrees;
depositing a first film on the substrate, wherein depositing the first film includes;
depositing first electrode material using a deposition source; and
supplying particles energized above about 5 eV from a second source such that the particles provide energy to the first electrode material to deposit the first electrode material into a highly ordered crystal film;
forming an electrolyte second film so as to be in contact with the first film; and
forming a fourth film in contact with the third film and separate from the first film, the fourth electrode film including a second electrode material;
wherein the first electrode material or the second electrode material or both include a metal or an intercalation material. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 58, 59, 60, 61, 62, 63, 64)
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57. A rechargeable energy-storage device, comprising:
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a substrate having a melting point less than 700 degrees;
a first film adjacent to the substrate, the first film including an electrode material deposited using particles that have energy above about 5 eV such that the particles provide energy to the electrode material to form the electrode material into a highly ordered crystal film;
an electrolyte second film adjacent to the first film;
a third film adjacent the electrolyte second film and separate from the first film, the third film including a second electrode material; and
wherein the first electrode material or the second electrode material or both the first and second electrode materials are a metal or an intercalation material, whereby the substrate is not subject to a high temperature anneal.
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65. A method of fabricating a solid-state energy-storage device, comprising:
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providing a substrate;
forming a seed film on the substrate;
forming a first film on the seed film by;
(a) depositing a first material to a location on the seed film, and (b) supplying a second material different than the first material adjacent the location to control growth of a crystalline structure of the first material at the location;
forming an electrolyte second film on the first film; and
forming a third film on the electrolyte second film. - View Dependent Claims (66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 107)
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79. A thin-film, rechargeable energy-storage device, comprising:
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a substrate having a melting point of less than 700 degrees;
a first film in contact with the substrate;
an electrolyte second film in contact with the first film; and
a third film in contact with the electrolyte second film, the third film being separate from the first film, wherein the first film or the third film or both the first and third films includes an intercalation material. - View Dependent Claims (80, 81, 82, 83, 84, 85, 86, 87, 88)
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89. A thin-film, rechargeable energy-storage device, comprising:
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a substrate;
a seed layer adjacent to the substrate;
a first film on the seed layer;
an electrolyte second film adjacent to the first film; and
a third film adjacent to the electrolyte second film, wherein the first film or the third film or both the first and third films include an intercalation material. - View Dependent Claims (90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100)
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101. A method of fabricating a solid-state energy-storage device, comprising:
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providing a substrate;
depositing a first layer on the substrate by;
(a) depositing a first material to a location on the substrate, and (b) supplying energized particles of a second material different than the first material to the substrate adjacent the location to control growth of a crystalline structure of the first material at the location;
forming an electrolyte second layer on the first layer; and
forming a third layer on the electrolyte second layer, after performing the above steps, cryogenically annealing the energy-storage device. - View Dependent Claims (102, 103, 104, 105, 106)
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Specification