Thin-film battery having ultra-thin electrolyte and associated method
First Claim
1. A method of fabricating an energy storage device, comprising:
- providing a substrate;
forming an electrode first film;
forming an electrolyte second film, wherein forming the electrolyte second film includes;
depositing electrolyte material using a deposition source; and
supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure; and
forming an electrode third film.
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
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Citations
36 Claims
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1. A method of fabricating an energy storage device, comprising:
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providing a substrate;
forming an electrode first film;
forming an electrolyte second film, wherein forming the electrolyte second film includes;
depositing electrolyte material using a deposition source; and
supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure; and
forming an electrode third film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A solid-state energy-storage device, comprising:
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an electrode first film;
an electrolyte second film;
an electrode third film; and
ions having an energy of greater than about 5 eV. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification