Container for treating with corrosive-gas and plasma and method for manufacturing the same
First Claim
1. A treatment container for corrosive-gas and/or plasma etching or depositing, which has a portion of an inner surface of the container to be exposed to corrosive gas and/or plasma, and comprises a sintered body including mainly an yttria-alumina compound, wherein the portion is provided with a roughened surface having a mean roughness Ra of 1.5 to 10 μ
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1 Assignment
0 Petitions
Accused Products
Abstract
There is provided a treatment container which enables to prolong a period of time taken for reaction products, such as a halide generated through reaction with corrosive halide gas, to exfoliate and fall down as particles, and decreases the frequency of periodic maintenance operation, thereby implementing increase of operating time. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1.5 to 10 μm.
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Citations
23 Claims
- 1. A treatment container for corrosive-gas and/or plasma etching or depositing, which has a portion of an inner surface of the container to be exposed to corrosive gas and/or plasma, and comprises a sintered body including mainly an yttria-alumina compound, wherein the portion is provided with a roughened surface having a mean roughness Ra of 1.5 to 10 μ
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9. A method for manufacturing a treatment container for corrosive-gas and/or plasma etching or depositing, wherein the method comprises:
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molding a powder mainly composed of an yttria and alumina compound in a specified shape of the treatment container;
then sintering the molded body into a sintered body; and
blasting a portion of the inner surface of the sintered body which portion is to be exposed in the corrosive gas and/or plasma to obtain a roughened surface. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method for manufacturing a treatment container for corrosive gas and/or plasma etching or depositing, where the method comprises:
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molding a powder mainly composed of an yttria and alumina compound into a specified shaped molded body, wherein the powder is rubber pressed with use of a core having a roughened surface so as to transfer the roughened surface configuration on the core to an inner surface of the molded body; and
sintering the molding body into a sintered body to obtain the treatment container having the roughened surface in the portion to be exposed to the corrosive gas and/or plasma. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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Specification