Container for treating with corrosive-gas and plasma and method for manufacturing the same

• US 20020009560A1
• Filed: 05/29/2001
• Published: 01/24/2002
• Est. Priority Date: 05/30/2000
• Status: Active Grant

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: Ozono, Shunichi
• Granted Patent: US 6,645,585 B2
• Time in Patent Office: Days
• US Class Current: 428/34.4
• CPC Class Codes: B32B 1/00 Layered products having a non-planar shape
• CPC Class Codes: B32B 1/02 Receptacles , i.e. rigid containers, e.g. tanks
• CPC Class Codes: C04B 35/18 rich in aluminium oxide
• CPC Class Codes: C04B 35/44 based on aluminates
• CPC Class Codes: C04B 35/505 based on yttrium oxide
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/53 involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete C04B41/0036 - C04B41/0054 take precedence
• CPC Class Codes: C04B 41/91 involving the removal of part of the materials of the treated articles, e.g. etching
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: Y10S 156/914 Differential etching apparatus including particular materials of construction
• CPC Class Codes: Y10S 156/916 Differential etching apparatus including chamber cleaning means or shield for preventing deposits
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/1317 Multilayer [continuous layer]
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Abstract

There is provided a treatment container which enables to prolong a period of time taken for reaction products, such as a halide generated through reaction with corrosive halide gas, to exfoliate and fall down as particles, and decreases the frequency of periodic maintenance operation, thereby implementing increase of operating time. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1.5 to 10 μm.

Claims

1. A treatment container for corrosive-gas and/or plasma etching or depositing, which has a portion of an inner surface of the container to be exposed to corrosive gas and/or plasma, and comprises a sintered body including mainly an yttria-alumina compound, wherein the portion is provided with a roughened surface having a mean roughness Ra of 1.5 to 10 μ

m.

2. The treatment container according to claim 1, wherein the treatment container comprises an introduction tube for introducing corrosive gas to be equipped with an induction coil surrounding outside the introduction tube, and the inner surface of the introduction tube is a smooth surface having a mean roughness Ra of 1.5 μ

m or less.

3. The container according to claim 1, wherein the sintered body further contains zirconia of 0.05 to 5.0% by weight.

4. The container according to claim 3, wherein the zirconia takes the form of a phase dispersed in the sintered body, and the zirconia phase contains ceria as a stabilizing agent.

5. The container according to claim 1, wherein a main crystal phase in the sintered body contains yttrium-aluminum-garnet, alone or with combination to alumina or yttria.

6. The container according to claim 1, wherein a resin film is applied on the outer surface of the treatment container.

7. The container according to claim 6, wherein the resin film is a fluoro-resin film having a thickness of 0.2 to 2.0 mm.

8. The container according to claim 1, wherein the corrosive gas is a substance containing halogen.

9. A method for manufacturing a treatment container for corrosive-gas and/or plasma etching or depositing, wherein the method comprises:

molding a powder mainly composed of an yttria and alumina compound in a specified shape of the treatment container;

then sintering the molded body into a sintered body; and

blasting a portion of the inner surface of the sintered body which portion is to be exposed in the corrosive gas and/or plasma to obtain a roughened surface.

10. The method according to claim 9, wherein the mean roughness Ra of the roughened surface portion is in a range of 1.5 to 10 μ

m.

11. The method according to claim 9, wherein the sintered body further contains zirconia of 0.05 to 5.0% by weight therein.

12. The method according to claim 11, wherein the zirconia takes the form of a phase dispersed in the sintered body, and the zirconia phase contains ceria as a stabilizing agent.

13. The method according to claim 9, wherein the main crystal phase of the yttria and alumina compound in the sintered body comprises yttrium-aluminum-garnet alone or with combination to alumina or yttria.

14. The method according to claim 9, wherein the method further comprises applying a resin film to the outer surface of the treatment container after sintering.

15. The method according to claim 14, wherein the resin film is a fluororesin film having a thickness of 0.2 to 2.0 mm.

16. A method for manufacturing a treatment container for corrosive gas and/or plasma etching or depositing, where the method comprises:

molding a powder mainly composed of an yttria and alumina compound into a specified shaped molded body, wherein the powder is rubber pressed with use of a core having a roughened surface so as to transfer the roughened surface configuration on the core to an inner surface of the molded body; and

sintering the molding body into a sintered body to obtain the treatment container having the roughened surface in the portion to be exposed to the corrosive gas and/or plasma.

17. The method according to claim 16, wherein a mean roughness Ra of the roughened surface is in a range of 1.5 to 10 μ

m.

18. The method according to claim 16, wherein the sintered body further contains zirconia of 0.05 to 5.0% by weight.

19. The method according to claim 18, wherein the zirconia takes the form of a phase dispersed in the sintered body, and the zirconia phase contains ceria as a stabilizing agent.

20. The method according to claim 16, wherein the sintered body contains yttrium-aluminum-garnet, alone or with combination to alumina or yttria.

21. The method according to claim 16, wherein the method further comprises applying a resin film on the outer surface of the treatment container.

22. The method according to claim 16, wherein the resin film is a fluoro-resin film having a thickness of 0.2 to 2.0 mm.

23. The method according to claim 16, wherein the corrosive gas is a substance containing halogen.