Microelecto-mechanical system actuator device and reconfigurable circuits utilizing same
First Claim
1. A microelectro-mechanical device comprising:
- a fixed electrode formed on a substrate, said fixed electrode including a transparent, high resistance layer; and
a moveable electrode disposed adjacent said fixed electrode.
0 Assignments
0 Petitions
Accused Products
Abstract
A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves.
-
Citations
24 Claims
-
1. A microelectro-mechanical device comprising:
-
a fixed electrode formed on a substrate, said fixed electrode including a transparent, high resistance layer; and
a moveable electrode disposed adjacent said fixed electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
-
-
12. A reconfigurable circuit comprising:
an array of actuatable devices which are addressed individually or in selected groups, each of said actuatable-devices including;
a fixed electrode formed on a substrate, said fixed electrode including a transparent, high resistance layer; and
a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent said fixed electrode.
Specification