Controlling micro-electro-mechanical cavities
First Claim
1. Apparatus comprising a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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Abstract
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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Citations
32 Claims
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1. Apparatus comprising
a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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21. Apparatus comprising
an array of interferometric modulators, p1 actuation electrodes associated with the respective interferometric modulators, and a pattern of conductors connecting the actuation electrodes in groups.
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27. A method comprising
energizing one electrical structure to apply an electrostatic force in the vicinity of a cavity, independently energizing another electrical structure to apply an electrostatic force in the vicinity of a cavity.
Specification