×

Wireless MEMS capacitive sensor for physiologic parameter measurement

  • US 20020151816A1
  • Filed: 01/22/2002
  • Published: 10/17/2002
  • Est. Priority Date: 01/22/2001
  • Status: Active Grant
First Claim
Patent Images

1. An implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient, said sensor comprising:

  • an implantable sensing device, said sensing device being a micro electromechanical system (MEMS) comprising a substrate, an integrated inductor formed on the substrate, at least one sensor responsive to the physiologic parameters and being formed at least in part on the substrate, a plurality of conductive paths electrically connecting said integrated inductor with said sensor, said integrated inductor, said sensor and said conductive paths cooperatively defining an LC tank resonator.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×