Method and apparatus for determining the pass through flux of magnetic materials
First Claim
1. An apparatus for determining the pass through flux of a magnetic material comprising:
- at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;
one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field;
a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and
a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.
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Abstract
The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.
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Citations
44 Claims
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1. An apparatus for determining the pass through flux of a magnetic material comprising:
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at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;
one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field;
a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and
a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 19)
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14. A method for determining the pass through flux of a magnetic material comprising:
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generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material;
collecting magnetic field vector information at said other side of the magnetic material with at least one detector;
the at least one detector measuring one or both of the x and y components of the magnetic field.
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20. A method for determining the pass through flux of a magnetic material comprising:
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generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material;
collecting magnetic field vector information at said other side of the magnetic material with three separate detectors;
each of the three detectors being configured to detect a component of the magnetic field that is orthogonal to the components of the magnetic field detected by the other two detectors. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A method for determining the uniformity of magnetic sputtering target comprising:
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generating a magnetic field at one side of a sputtering target, and passing the magnetic field through the sputtering target and out an other side of the sputtering target;
collecting magnetic field vector information at said other side of the magnetic material with at least two separate detectors;
one of the at least two detectors being configured to detect a component of the magnetic field that is orthogonal to the component of the magnetic field detected by at least one other of the at least two detectors; and
processing the magnetic field vector information to determine a measure of uniformity of the magnetic sputtering target. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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Specification