Chip-mounting device and method of alignment
First Claim
1. A chip-mounting device having a chip-holding tool for holding a chip and a substrate-holding stage for holding a substrate on which said chip is to be mounted, the chip-mounting device comprising:
- a coarse adjustment table for coarsely adjusting the position of a chip or a substrate, at least one of said chip-holding tool and said substrate-holding stage being placed on said coarse adjustment table;
brake means provided on said coarse adjustment table for fixing the position of said coarse adjustment table after coarse adjustment; and
fine adjustment means provided on said coarse adjustment table for finely adjusting the position of a chip or a substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
A chip-mounting device comprises a chip-holding tool and a substrate-holding stage. At least one of the chip-holding tool and the substrate-holding stage is placed on a coarse adjustment table for coarse positioning of a chip or a substrate. Brake means for fixing the positioned coarse adjustment table is provided on the coarse adjustment table. Fine adjustment means for fine positioning of a chip or a substrate is provided on the coarse adjustment table. The chip-mounting device allows alignment with submicorn accuracy to be performed quickly, shortening tact time in chip mounting remarkably.
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Citations
5 Claims
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1. A chip-mounting device having a chip-holding tool for holding a chip and a substrate-holding stage for holding a substrate on which said chip is to be mounted, the chip-mounting device comprising:
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a coarse adjustment table for coarsely adjusting the position of a chip or a substrate, at least one of said chip-holding tool and said substrate-holding stage being placed on said coarse adjustment table;
brake means provided on said coarse adjustment table for fixing the position of said coarse adjustment table after coarse adjustment; and
fine adjustment means provided on said coarse adjustment table for finely adjusting the position of a chip or a substrate. - View Dependent Claims (2, 3)
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4. An alignment method in a chip-mounting device for recognizing an alignment mark provided on a chip held on a chip-holding tool and an alignment mark provided on a substrate held on a substrate-holding stage disposed below said chip-holding tool, by recognition means, and controlling the parallel movement and the rotation of at least one of said chip-holding tool and said substrate-holding stage to control a positional shift between both said alignment marks within a target accuracy by correcting the positional shift, comprising the steps of:
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coarsely adjusting the position of a chip or a substrate by driving at least one of said chip-holding tool and said substrate-holding stage by a coarse adjustment table;
fixing the coarsely adjusted position of said coarse adjustment table; and
finely adjusting the position of a chip or a substrate by driving at least one of said chip-holding tool and said substrate-holding stage by fine adjustment means. - View Dependent Claims (5)
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Specification