Parallel kinematic micromanipulator
First Claim
1. A parallel kinematic manipulator comprising:
- a base plate;
a mobile plate; and
a plurality of kinematic links arranged in parallel between the base plate and the mobile plate, wherein each one of the kinematic links comprises;
a first joint coupling the one kinematic link to the base plate and configured to allow the one kinematic link to move relative to the base plate;
a second joint coupling the one kinematic link to the mobile plate and configured to allow the one kinematic link to move relative to the mobile plate; and
a piezoelectric linear actuator assembly configured to move the one kinematic link with a substantially continuous motion.
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Abstract
A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.
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Citations
20 Claims
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1. A parallel kinematic manipulator comprising:
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a base plate;
a mobile plate; and
a plurality of kinematic links arranged in parallel between the base plate and the mobile plate, wherein each one of the kinematic links comprises;
a first joint coupling the one kinematic link to the base plate and configured to allow the one kinematic link to move relative to the base plate;
a second joint coupling the one kinematic link to the mobile plate and configured to allow the one kinematic link to move relative to the mobile plate; and
a piezoelectric linear actuator assembly configured to move the one kinematic link with a substantially continuous motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of operating a parallel kinematic manipulator comprising a base plate, a mobile plate, a plurality of kinematic links, first joints coupling the kinematic links to the base plate, second joints coupling the kinematic links to the mobile plate, and a plurality of piezoelectric linear actuator assemblies, wherein the kinematic links are arranged in parallel between the base plate and the mobile plate, the method comprising:
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operating the piezoelectric linear actuator assemblies to move the kinematic links with a substantially continuous motion;
in the first joints, allowing the kinematic links to move relative to the base plate; and
in the second joints, allowing the kinematic links to move relative to the mobile plate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification