Parallel kinematic micromanipulator
First Claim
1. A parallel kinematic manipulator comprising:
- a base plate;
a mobile plate; and
a plurality of kinematic links arranged in parallel between the base plate and the mobile plate, wherein each one of the kinematic links comprises;
a first joint coupling the one kinematic link to the base plate and configured to allow the one kinematic link to move relative to the base plate;
a second joint coupling the one kinematic link to the mobile plate and configured to allow the one kinematic link to move relative to the mobile plate; and
a piezoelectric linear actuator assembly configured to move the one kinematic link with a substantially continuous motion.
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Accused Products
Abstract
A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.
93 Citations
20 Claims
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1. A parallel kinematic manipulator comprising:
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a base plate;
a mobile plate; and
a plurality of kinematic links arranged in parallel between the base plate and the mobile plate, wherein each one of the kinematic links comprises;
a first joint coupling the one kinematic link to the base plate and configured to allow the one kinematic link to move relative to the base plate;
a second joint coupling the one kinematic link to the mobile plate and configured to allow the one kinematic link to move relative to the mobile plate; and
a piezoelectric linear actuator assembly configured to move the one kinematic link with a substantially continuous motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of operating a parallel kinematic manipulator comprising a base plate, a mobile plate, a plurality of kinematic links, first joints coupling the kinematic links to the base plate, second joints coupling the kinematic links to the mobile plate, and a plurality of piezoelectric linear actuator assemblies, wherein the kinematic links are arranged in parallel between the base plate and the mobile plate, the method comprising:
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operating the piezoelectric linear actuator assemblies to move the kinematic links with a substantially continuous motion;
in the first joints, allowing the kinematic links to move relative to the base plate; and
in the second joints, allowing the kinematic links to move relative to the mobile plate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification