Microelement piezoelectric feedback type picking and releasing device
First Claim
1. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material and an interdigital transducer electrode plated on said piezoelectric material.
1 Assignment
0 Petitions
Accused Products
Abstract
A microelement piezoelectric feedback type picking and releasing device is constructed to include a piezoelectric material, an IDT (interdigital transducer) electrode plated and a progressive electrode plated on the piezoelectric material, the progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction, the IDT electrode forming a releasing unit by means of surface acoustic wave/ultrasonic wave and serving as a voltage signal feedback sensor for clamping force control.
-
Citations
7 Claims
- 1. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material and an interdigital transducer electrode plated on said piezoelectric material.
-
4. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction.
- 5. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, an interdigital transducer electrode plated on said piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode comprising a plurality of electrode elements of different sizes arranged in proper order in one direction.
Specification