Microelement piezoelectric feedback type picking and releasing device

• US 6,710,512 B2
• Filed: 06/21/2002
• Issued: 03/23/2004
• Est. Priority Date: 06/21/2002
• Status: Expired due to Fees

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Tsai, Hung-Yin, Cheng, Chih-Yung, Liu, Ping-Yin
• Primary Examiner(s): Mullins, Burton S.
• Assistant Examiner(s): ADDISON, KAREN B
• Application Number:
  US10/175,841
• Publication Number:
  US 20030234594A1
• Time in Patent Office: 641 Days
• Field of Search: 310/328, 310/323.17, 310/323.18, 310/366, 310/313.B, 310/313.C, 333/154
• US Class Current: 310/313.00R
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: B81C 99/002 Apparatus for assembling MEMS, e.g. micromanipulators micromanipulators per se B25J7/00
• CPC Class Codes: H10N 30/302 Sensors

Abstract

A microelement piezoelectric feedback type picking and releasing device is constructed to include a piezoelectric material, an IDT (interdigital transducer) electrode plated and a progressive electrode plated on the piezoelectric material, the progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction, the IDT electrode forming a releasing unit by means of surface acoustic wave/ultrasonic wave and serving as a voltage signal feedback sensor for clamping force control.

Claims

1. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material and an interdigital transducer electrode plated on said piezoelectric material, wherein said interdigital transducer electrode serves as a voltage signal feedback sensor, forming a clamping force control unit.

2. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 1, wherein said interdigital transducer electrode forms a releasing unit by means of surface acoustic wave/ultrasonic wave.

3. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode having a plurality of electrode elements of different sizes arranged in an order of decreasing size order in one direction.

4. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, an interdigital transducer electrode plated on said piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode comprising a plurality of electrode elements of different sizes arranged in proper order in one direction, wherein interdigital transducer electrode serves as a voltage signal feedback sensor, forming a clamping force control unit.

5. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 4, wherein said interdigital transducer electrode forms a releasing unit by means of surface acoustic wave/ultrasonic wave.