Apparatus and method for depositing material onto multiple independently moving substrates in a chamber
First Claim
1. A system comprising:
- a deposition chamber that contains;
a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel and a first take-up reel, and a second source reel and a second take-up reel;
a deposition station configured to deposit material onto a first strip of substrate running between the first source reel and the first take-up reel, and to deposit material onto a second strip of substrate running between the second source reel and the second take-up reel; and
a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension.
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Accused Products
Abstract
A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies onto a second strip of substrate running between the second source reel and a second take-up reel; and a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension. Some embodiments further include a roll-to-roll mask that has a plurality of different mask patterns that are moved into place as needed.
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Citations
15 Claims
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1. A system comprising:
a deposition chamber that contains;
a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel and a first take-up reel, and a second source reel and a second take-up reel;
a deposition station configured to deposit material onto a first strip of substrate running between the first source reel and the first take-up reel, and to deposit material onto a second strip of substrate running between the second source reel and the second take-up reel; and
a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension. - View Dependent Claims (2, 3, 4, 5, 12, 13, 14, 15)
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6. A method comprising:
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moving a plurality of substrate strips through a deposition station at independent rates of movement; and
depositing material in layers on each of the substrate strips. - View Dependent Claims (7, 8, 9, 10)
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11. A system comprising:
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a deposition chamber that contains;
means for moving a plurality of substrate strips through a deposition station at independent rates of movement; and
a deposition station that deposits material in layers on each of the substrate strips.
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Specification