Optical device and method of manufacture thereof, and electronic instrument
First Claim
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1. A method of manufacturing an optical device, comprising:
- mounting an optical element on a substrate;
adhering a flexible member to the substrate so as to cover the optical element, to define a closed space between the substrate and the flexible member; and
evacuating the closed space.
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Abstract
The invention provides an optical device having an optical element, a substrate, and a flexible member. A first portion of the flexible member is disposed so as to be spaced from the substrate, a second portion surrounding the first portion is adhered to the substrate, and a closed space is defined between the first portion and the substrate. The optical element is mounted on the substrate within the closed space.
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Citations
5 Claims
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1. A method of manufacturing an optical device, comprising:
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mounting an optical element on a substrate;
adhering a flexible member to the substrate so as to cover the optical element, to define a closed space between the substrate and the flexible member; and
evacuating the closed space. - View Dependent Claims (2, 3, 4, 5)
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Specification