Light emitting device methods
First Claim
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1. A method of making a light-emitting device, the method comprising:
- disposing a planarization layer on a surface of a layer of semiconductor material;
disposing a lithography layer on a surface of the planarization layer; and
performing nanolithography to remove at least a portion of the planarization layer, at least a portion of the lithography layer and at least a portion of the layer of semiconductor material, thereby forming a dielectric function in the surface of the layer of semiconductor material that varies spatially according to a pattern.
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Abstract
Light-emitting device methods are disclosed.
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Citations
106 Claims
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1. A method of making a light-emitting device, the method comprising:
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disposing a planarization layer on a surface of a layer of semiconductor material;
disposing a lithography layer on a surface of the planarization layer; and
performing nanolithography to remove at least a portion of the planarization layer, at least a portion of the lithography layer and at least a portion of the layer of semiconductor material, thereby forming a dielectric function in the surface of the layer of semiconductor material that varies spatially according to a pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
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61. A method of making a light-emitting device, the method comprising:
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providing an article that comprises a layer of semiconductor material, and a planarization layer supported by the layer of semiconductor material; and
performing nanolithography to remove at least a portion of the planarization layer and at least a portion of the layer of semiconductor material, thereby forming a dielectric function in the surface of the layer of semiconductor material that varies spatially according to a pattern. - View Dependent Claims (62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106)
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Specification