System and method for inductive coupling of an expanding thermal plasma
First Claim
1. A method for generating plasma using a plasma generator system, said method comprising the steps of:
- introducing energy and a reactant to a plasma generation apparatus of the plasma generator system for generating plasma; and
expanding and inductively coupling the generated plasma.
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Accused Products
Abstract
A method is provided for generating plasma using a plasma generator system. The method includes the steps of introducing energy and a reactant to a plasma generation apparatus of the plasma generator system for generating plasma, and expanding and inductively coupling the generated plasma. In another embodiment a plasma generation system is provided including a plasma generation apparatus for generating thermal plasma. The thermal plasma is received by a plasma treatment chamber external to the plasma generation apparatus. A pressure control system maintains a lower pressure in the plasma treatment chamber than in the plasma generation apparatus during plasma generation for causing the thermal plasma to expand within the plasma treatment chamber. An inductor system inductively couples the thermal plasma.
23 Citations
21 Claims
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1. A method for generating plasma using a plasma generator system, said method comprising the steps of:
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introducing energy and a reactant to a plasma generation apparatus of the plasma generator system for generating plasma; and
expanding and inductively coupling the generated plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A plasma generation system comprising:
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a plasma generation apparatus for generating thermal plasma;
a plasma treatment chamber external to said plasma generation apparatus receiving the thermal plasma from the plasma generation apparatus;
a pressure control system for maintaining a lower pressure in the plasma treatment chamber than in the plasma generation apparatus during plasma generation for causing the thermal plasma to expand within the plasma treatment chamber; and
an inductor system for inductively coupling the thermal plasma. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A plasma generation system comprising:
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an apparatus for generating a plasma;
an apparatus for receiving the generated plasma and providing for expansion of the generated plasma, and an apparatus for inductively coupling the generated plasma;
wherein the apparatus for receiving and the apparatus for inductively coupling together form the generated plasma into an inductively coupled and expanded plasma. - View Dependent Claims (17, 18)
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19. A plasma generator system comprising:
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means for generating plasma by introducing energy and a reactant to the plasma generator system; and
means for expanding and inductively coupling the generated plasma.
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20. An expanding inductively coupled plasma, said plasma generated by the method comprising the steps of:
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introducing energy and a reactant to a plasma generation apparatus of a plasma generator system for generating plasma; and
expanding and inductively coupling the generated plasma.
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21. An object having at least one surface, the surface treated using an expanding inductively coupled plasma, said plasma generated by the method comprising the steps of:
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introducing energy and a reactant to a plasma generation apparatus of a plasma generator system for generating plasma; and
expanding and inductively coupling the generated plasma.
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Specification