Rear projection TV with improved micromirror array
First Claim
1. A rear projection TV, comprising:
- an arc lamp for providing light to a light modulator that comprises a rectangular array of micromirrors;
the micromirrors of the array being tiled together, each micromirror having four substantially straight sides and wherein the micromirrors are substantially square;
a screen on which an image to be viewed is displayed;
wherein a light beam from the arc lamp is incident on the array of micromirrors during operation and directed as a rectangular image to the screen;
wherein the micromirrors of the array are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on the screen;
wherein the micromirrors correspond to pixels in a viewed image on the screen;
wherein both the ON and OFF states of the micromirrors are in a position other than a flat non-deflected state;
wherein the ON position of the micromirrors is from 10 to 15 degrees from a non-deflected position;
wherein none of the four substantially straight sides of the micromirrors is parallel to any sides of the array;
wherein the viewed image has four sides and wherein there are no pixel sides in the viewed image that are parallel to any image sides; and
wherein the micromirror array has a substantially rectangular shape;
one or more lenses for directing and focusing a beam of light onto the micromirrors;
wherein the light beam is incident at a substantially 90 degree angle to at least one side of the rectangular array;
wherein the light beam incident on the micromirrors is from 10 to 50 degrees from a line normal to the plane of the micromirrors when not deflected;
wherein the micromirrors comprise micromirror plates that are connected via hinges to a substrate;
wherein the substrate, micromirror plates and hinges are disposed in different planes;
wherein the hinge has a width of from 0.1 to 10 um;
wherein the thickness of the micromirror plate is from 200 to 7300 angstroms;
wherein the micromirrors are positioned on a lattice aligned at an angle to the sides of the rectangular array;
wherein the micromirrors are disposed on a semiconductor substrate which is a silicon substrate;
wherein the micromirrors are connected via underlying hinges to the silicon substrate by an electrically conductive material;
wherein the micromirrors are formed on the silicon substrate with circuitry and electrodes adjacent to the micromirrors;
wherein at least two electrodes are disposed adjacent each micromirror, wherein one of the two electrodes is for electrostatically addressing the adjacent micromirror to an OFF position, and another of the two electrodes is for electrostatically addressing the adjacent micromirror to an ON position;
wherein the light is directed at an angle substantially perpendicular to the switching axis of the micromirrors;
wherein the micromirrors in the array have switching axes substantially parallel to at least one side of the rectangular array;
wherein the micromirrors in the array have switching axes at an angle of from 35 to 60 degrees to one or more sides of the micromirrors;
where the micromirrors have substantially no micromirror sides perpendicular to the light beam from the light source;
wherein the micromirror comprises a reflective material that comprises aluminum;
wherein the micromirror array has an area of from 1 cm2 to 1 in2;
wherein the micromirror array is disposed in a package having a light transmissive window, and wherein the light transmissive window is glass or quartz;
wherein the package is hermetic;
wherein the micromirror array comprises circuitry and electrodes on a semiconductor substrate, and bond wires for electrically connecting the semiconductor substrate to the package;
wherein a getter is provided within the package; and
a source of stiction reducing agent is provided within the package;
and wherein the projection TV further comprising optics including a plurality of lenses disposed so as to project light reflected from the micromirrors onto the screen.
3 Assignments
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Accused Products
Abstract
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.
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Citations
10 Claims
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1. A rear projection TV, comprising:
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an arc lamp for providing light to a light modulator that comprises a rectangular array of micromirrors;
the micromirrors of the array being tiled together, each micromirror having four substantially straight sides and wherein the micromirrors are substantially square;
a screen on which an image to be viewed is displayed;
wherein a light beam from the arc lamp is incident on the array of micromirrors during operation and directed as a rectangular image to the screen;
wherein the micromirrors of the array are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on the screen;
wherein the micromirrors correspond to pixels in a viewed image on the screen;
wherein both the ON and OFF states of the micromirrors are in a position other than a flat non-deflected state;
wherein the ON position of the micromirrors is from 10 to 15 degrees from a non-deflected position;
wherein none of the four substantially straight sides of the micromirrors is parallel to any sides of the array;
wherein the viewed image has four sides and wherein there are no pixel sides in the viewed image that are parallel to any image sides; and
wherein the micromirror array has a substantially rectangular shape;
one or more lenses for directing and focusing a beam of light onto the micromirrors;
wherein the light beam is incident at a substantially 90 degree angle to at least one side of the rectangular array;
wherein the light beam incident on the micromirrors is from 10 to 50 degrees from a line normal to the plane of the micromirrors when not deflected;
wherein the micromirrors comprise micromirror plates that are connected via hinges to a substrate;
wherein the substrate, micromirror plates and hinges are disposed in different planes;
wherein the hinge has a width of from 0.1 to 10 um;
wherein the thickness of the micromirror plate is from 200 to 7300 angstroms;
wherein the micromirrors are positioned on a lattice aligned at an angle to the sides of the rectangular array;
wherein the micromirrors are disposed on a semiconductor substrate which is a silicon substrate;
wherein the micromirrors are connected via underlying hinges to the silicon substrate by an electrically conductive material;
wherein the micromirrors are formed on the silicon substrate with circuitry and electrodes adjacent to the micromirrors;
wherein at least two electrodes are disposed adjacent each micromirror, wherein one of the two electrodes is for electrostatically addressing the adjacent micromirror to an OFF position, and another of the two electrodes is for electrostatically addressing the adjacent micromirror to an ON position;
wherein the light is directed at an angle substantially perpendicular to the switching axis of the micromirrors;
wherein the micromirrors in the array have switching axes substantially parallel to at least one side of the rectangular array;
wherein the micromirrors in the array have switching axes at an angle of from 35 to 60 degrees to one or more sides of the micromirrors;
where the micromirrors have substantially no micromirror sides perpendicular to the light beam from the light source;
wherein the micromirror comprises a reflective material that comprises aluminum;
wherein the micromirror array has an area of from 1 cm2 to 1 in2;
wherein the micromirror array is disposed in a package having a light transmissive window, and wherein the light transmissive window is glass or quartz;
wherein the package is hermetic;
wherein the micromirror array comprises circuitry and electrodes on a semiconductor substrate, and bond wires for electrically connecting the semiconductor substrate to the package;
wherein a getter is provided within the package; and
a source of stiction reducing agent is provided within the package;
and wherein the projection TV further comprising optics including a plurality of lenses disposed so as to project light reflected from the micromirrors onto the screen. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification