Temperature measuring system, heating device using it and production method for semiconductor wafer, heat ray insulating translucent member, visible light reflection membner, exposure system-use reflection mirror and exposure system, and semiconductor device produced by using them and vetical heat treating device
First Claim
1. A temperature measuring system for measuring temperature of an object-to-be-measured by detecting heat ray radiated from the object-to-be-measured, comprising:
- a reflecting member which is disposed so as to oppose with a temperature measurement surface of the object-to-be-measured while forming a reflection gap between itself and the temperature measurement surface, and has a portion of which including a reflection surface composed of a heat ray reflecting material capable of reflecting heat ray of a specific wavelength band, so as to allow multiple reflection of the heat ray between itself and the temperature measurement surface;
a heat ray extraction pathway section disposed so as to direct one end thereof as being opposed to the temperature measurement surface, penetrating the reflecting member; and
a temperature detection section for measuring temperature of the object-to-be-measured on the temperature measurement surface thereof, by detecting the heat ray extracted out from the reflection gap through the heat ray extraction pathway section, wherein the heat ray reflecting material is configured in a form of a stack comprising a plurality of element reflecting layers composed of a material having transparent properites to the heat ray, in which every adjacent two element reflecting layers are composed of a combination of materials having refractive indices which differ from each other by 1.1 or more.
1 Assignment
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Accused Products
Abstract
Oppositely of a temperature measuring surface of an object-to-be-measured 16, a reflecting member 28 is disposed while being spaced by a reflection gap 35 from the temperature measuring surface. The reflecting member 28 is composed of a heat ray reflecting material capable of reflecting heat ray in a specific wavelength band, in a portion including a reflection surface 35a. A heat ray extraction pathway section 30 is disposed through the reflecting member 28 so that one end thereof faces the temperature measuring surface. Heat ray extracted through the heat ray extraction pathway section from the reflection gap is detected by a temperature detection section 34. The heat ray reflecting material is configured in a form of a stack comprising a plurality of element reflecting layers composed of a material having transparent properties to the heat ray, in which every adjacent two element reflecting layers are composed of a combination of materials having refractive indices which differ from each other by 1.1 or more. This makes the measurement be hardly affected by radiation ratio of the object-to-be-measured when temperature of the object-to-be-measured is measured by a radiation thermometer, enables to measure its temperature more correctly irrespective of the surface state thereof, and can simplify configuration of a measurement system.
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Citations
74 Claims
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1. A temperature measuring system for measuring temperature of an object-to-be-measured by detecting heat ray radiated from the object-to-be-measured, comprising:
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a reflecting member which is disposed so as to oppose with a temperature measurement surface of the object-to-be-measured while forming a reflection gap between itself and the temperature measurement surface, and has a portion of which including a reflection surface composed of a heat ray reflecting material capable of reflecting heat ray of a specific wavelength band, so as to allow multiple reflection of the heat ray between itself and the temperature measurement surface;
a heat ray extraction pathway section disposed so as to direct one end thereof as being opposed to the temperature measurement surface, penetrating the reflecting member; and
a temperature detection section for measuring temperature of the object-to-be-measured on the temperature measurement surface thereof, by detecting the heat ray extracted out from the reflection gap through the heat ray extraction pathway section, wherein the heat ray reflecting material is configured in a form of a stack comprising a plurality of element reflecting layers composed of a material having transparent properites to the heat ray, in which every adjacent two element reflecting layers are composed of a combination of materials having refractive indices which differ from each other by 1.1 or more. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A lamp having a light emitting portion, and a bulb surrounding the light emitting portion and allowing light from the light emitting portion to emit outward, wherein the bulb comprising:
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a base having a transparent properties to visible light emitted from the light emitting portion; and
a heat ray reflecting material layer formed on the surface of the base, and for reflecting heat ray emitted from the light emitting portion towards inside of the bulb while also allowing the visible light to transmit therethrough, wherein the heat ray reflecting material layer has a stacked structure in which refractive index to the heat ray periodically varies in the direction of stacking, wherein the range of variation within a single period of the refractive index is set to 1.1 or above, and converted thickness θ
′
on the single period basis expressed by the formula (1) below is adjusted to 0.4 to 2 μ
m;
θ
′
=∫
0tn(t)·
tdt
(1)where the function n(t) expresses distribution of refractive index to the heat ray in the direction of thickness t in a single period. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A heat ray intercepting light transmissive member comprising:
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a base having transparent properties to the visible light; and
a heat ray reflecting material layer formed on the surface of the base, and providing a heat ray intercepting function to the base by reflecting heat ray while allowing the visible light to transmit therethrough, wherein the heat ray reflecting material layer has a stacked structure in which refractive index to the heat ray periodically varies in the direction of stacking, wherein the range of variation within a single period of the refractive index is set to 1.1 or above, and converted thickness θ
′
on the single period basis expressed by the formula (1) below is adjusted to 0.4 to 2 μ
m;
θ
′
=∫
0tn(t)·
tdt
(1)where the function n(t) expresses distribution of refractive index to the heat ray in the direction of thickness t in a single period. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A visible light reflecting member for reflecting visible light in a specific wavelength region in the visible wavelength band,
having a stack comprising a plurality of periodic structural bodies in which two or more types of media differing in refractive index to the visible light are periodically arranged, as being formed on a base, and the periodic structural bodies are adjusted in the thickness of a single period so as to show a behavior as a linear photonic crystal to the visible light.
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59. A reflecting mirror for light exposure apparatus used as a multi-layered-film reflecting mirror for at least either one of a mask pattern layer, a lighting optical system and a projection optical system composing a light exposure apparatus which irradiates a first base having a mask pattern layer which serves as a mask pattern formed thereon with exposure light obtained from a light source, through the lighting optical system, to thereby transfer an image of the mask pattern through a projection optical system onto a second base in a shrunk manner,
and having a stack comprising a plurality of periodic structural bodies in which two or more types of media differing in refractive index to the exposure light are periodically arranged, as being formed on a base, and the periodic structural bodies are adjusted in the thickness of a single period so as to show a behavior as a linear photonic crystal to the exposure light.
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67. A vertical annealing apparatus having a vertical reaction tube, a wafer boat on which a plurality of wafers are loaded in parallel, a heat retaining cylinder for supporting the wafer boat, a heater surrounding the side portion of the reaction tube, a side heat insulator surrounding the heater, and an upper heat insulator placed on the top of the reaction tube;
- wherein
the apparatus being configured so as to dispose a heat ray reflector for reflecting heat ray in a specific wavelength band at least at either position of the heat retaining cylinder and the upper heat insulator, the heat ray reflector being configured in a form of a stack comprising a plurality of element reflecting layers having transparent properties to the heat ray on the surface of the base, in which every adjacent two element reflecting layers are composed of a combination of materials having refractive indices to the heat ray which differ from each other by 1.1 or more. - View Dependent Claims (68, 69, 70, 71, 72, 73, 74)
- wherein
Specification