Micropump check valve and method of manufacturing the same
First Claim
1. A method of manufacturing a micropump check valve arranged in a flow path for flowing a fluid by pressure change, the method comprising:
- forming a valve part in a valve forming member;
forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part;
bonding the valve forming member and the valve receiving member with the valve part of the valve forming member facing the valve receptor of the valve receiving member; and
pressurizing and projecting the valve receptor towards the valve part from the side away from the valve part after bonding, and contacting the valve part to the valve receptor while applying urging force.
2 Assignments
0 Petitions
Accused Products
Abstract
The invention provides a method capable of manufacturing a micropump check valve, inexpensively and without much trouble or time, which does not cause disadvantages even if a material that dissolves an adhesive is contained in the fluid, and which allows bonding with high accuracy. After a valve forming member and a valve receiving member are bonded, a valve receptor is projected towards a valve part and pretension is applied. Thus, the valve forming member and the valve receiving member can be satisfactorily bonded through a solid phase diffusion bonding method and the like using a relatively inexpensive material, such as stainless steel, without using an adhesive, and the pretension is not reduced when in the annealing state.
21 Citations
6 Claims
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1. A method of manufacturing a micropump check valve arranged in a flow path for flowing a fluid by pressure change, the method comprising:
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forming a valve part in a valve forming member;
forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part;
bonding the valve forming member and the valve receiving member with the valve part of the valve forming member facing the valve receptor of the valve receiving member; and
pressurizing and projecting the valve receptor towards the valve part from the side away from the valve part after bonding, and contacting the valve part to the valve receptor while applying urging force. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification