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Micropump check valve and method of manufacturing the same

  • US 20050158188A1
  • Filed: 01/13/2005
  • Published: 07/21/2005
  • Est. Priority Date: 01/21/2004
  • Status: Active Grant
First Claim
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1. A method of manufacturing a micropump check valve arranged in a flow path for flowing a fluid by pressure change, the method comprising:

  • forming a valve part in a valve forming member;

    forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part;

    bonding the valve forming member and the valve receiving member with the valve part of the valve forming member facing the valve receptor of the valve receiving member; and

    pressurizing and projecting the valve receptor towards the valve part from the side away from the valve part after bonding, and contacting the valve part to the valve receptor while applying urging force.

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