X-ray tomography and laminography
First Claim
Patent Images
1. A device for tomographically imaging an object comprising:
- a compound refractive lens for x-rays having a focal length f;
an x-ray source, selected from the group consisting of an x-ray tube and a plasma x-ray source, which is oriented to direct x-rays toward said compound refractive lens;
an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and
wherein a device that moves the object and the imaging train consisting of the x-ray source, refractive x-ray lens and detector relative to each other so that the object is imaged over a range of angles around an axis through the object perpendicular to an optical axis defined by the centers of the source, lens and detector;
an image memory that combines said detector data signals from a range of positions to form an image database that contains information sufficient to form a cross-sectional image of a cutting plane of the object.
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Abstract
An apparatus for imaging objects with x rays using an x-ray tube, refractive x-ray lens and area detector. Cross sectional images of individual planes within an object are achieved through tomographic and laminographic exposure and image processing. The use of refractive x-ray lenses to achieve high resolution eliminates the need for vanishingly small microspot x-ray sources to achieve high resolution that current x-ray tomographic and laminographic systems suffer.
18 Citations
28 Claims
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1. A device for tomographically imaging an object comprising:
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a compound refractive lens for x-rays having a focal length f;
an x-ray source, selected from the group consisting of an x-ray tube and a plasma x-ray source, which is oriented to direct x-rays toward said compound refractive lens;
an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and
wherein a device that moves the object and the imaging train consisting of the x-ray source, refractive x-ray lens and detector relative to each other so that the object is imaged over a range of angles around an axis through the object perpendicular to an optical axis defined by the centers of the source, lens and detector;
an image memory that combines said detector data signals from a range of positions to form an image database that contains information sufficient to form a cross-sectional image of a cutting plane of the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device for tomographically imaging objects comprising:
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a compound refractive lens for x-rays having a focal length f;
a source that emits x-rays. an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
a reflective optic located between the source and object that serves to collimate and filter the radiation from the source with the output divergence from any given point on the reflective optic sufficient to fill 20% or more of the aperture of the compound refractive lens and with the mean reflected radiation from each point on the reflected optic directed toward the center of the compound refractive lens;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and
wherein a device that moves the object and the imaging train consisting of the x-ray source, reflective optic, refractive x-ray lens, and detector relative to each other so that the object is imaged over a range of angles around an axis through the object perpendicular to the optical axis defined by the centers of the reflective optic output plane, compound refractive lens and detector;
an image memory that combines said detector data signals from said range of angles to form an image database that contains information sufficient to form a cross-sectional image through a cutting plane of the object. - View Dependent Claims (10, 11)
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12. A device for imaging objects comprising
a compound refractive lens for neutrons having a focal length f; -
a neutron source which is oriented to direct x rays toward said compound refractive lens;
a neutron detector located at a distance i from said compound refractive lens and positioned to receive neutrons from said compound refractive lens, said neutron detector system further comprising an output which emits data signals corresponding to the neutron intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by neutrons from said neutron source that are directed toward said compound refractive lens; and
wherein a device that moves the object and the imaging train consisting of the neutron source, compound refractive lens and detector relative to each other so that the object is imaged over range of angles around an axis through the object perpendicular to the optical axis defined by the centers of the source, lens and detector;
an image memory that combines said detector data signals from said range of angles to form an image database which contains information sufficient to form a cross-sectional image through a cutting plane of the object. - View Dependent Claims (13, 14)
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15. A device for laminographically imaging objects comprising:
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a compound refractive lens for x-rays having a focal length f;
an x-ray source, selected from the group consisting of an x-ray tube and a plasma x-ray source, which is oriented to direct x rays toward said compound refractive lens;
an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-ray s from said x-ray source that are directed toward said compound refractive lens; and
wherein a device that moves the object and imaging train, consisting of the source, refractive lens and detector, relative to each other so that the optical axis defined by the centers of the source, compound refractive lens and detector precesses around a chosen axis through the object not perpendicular to the optical axis, allowing the visualization of planes through the object that are perpendicular to the chosen axis;
wherein said x ray detector collects data associated with positions encountered with such precession;
an image memory that combines said detector data signals from said positions to form an image database which contains information sufficient to form a cross-sectional image of a cutting plane through the object. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A device for laminographically imaging objects comprising:
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a compound refractive lens for x-rays having a focal length f;
a source that emits x-rays. an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
a reflective optic located between the source and object that serves to collimate and filter the radiation from the source with the output divergence from any given point on the reflective optic sufficient to fill 20% or more of the aperture of the compound refractive lens and with the mean reflected radiation from each point on the reflected optic directed toward the center of the compound refractive lens;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and
wherein a device that moves the object and imaging train, consisting of the source, reflective optic, refractive lens and detector, relative to each other so that the optical axis defined by the centers of the reflective optic output plane, lens and detector, precesses around a chosen axis through the object not perpendicular to the optical axis, allowing the visualization of planes through the object perpendicular to the chosen axis. an image memory that combines said detector data signals resulting from said precessing to form an image database that contains information sufficient to form a cross-sectional image of a cutting plane through the object.
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23. A device for imaging objects comprising
a compound refractive lens for neutrons having a focal length f; -
a neutron source which is oriented to direct x rays toward said compound refractive lens;
a neutron detector located at a distance i from said compound refractive lens and positioned to receive neutrons from said compound refractive lens, said neutron detector system further comprising an output which emits data signals corresponding to the neutron intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by neutrons from said neutron source that are directed toward said compound refractive lens; and
wherein a device that rotates the object or moving the source, neutron lens and detector so that an axis through the object precesses around the optical axis defined by the centers of the source, lens and detector, allowing the visualization of planes in the object perpendicular to the chosen axis. an image memory that combines said detector data signals resulting from said precession to form an image database which contains information sufficent to form a cross-sectional image of a cutting plane of the object. - View Dependent Claims (24, 25)
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26. A device for tomographically imaging objects comprising:
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a compound refractive lens for x-rays having a focal length f;
a source that emits x-rays that then pass through the object to be imaged, wherein the divergence of x rays transmitted through each point in the object within the field of view is sufficient to fill 20% or more of the aperture of the refractive x-ray lens;
an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-ray s from said x-ray source that are directed toward said compound refractrive lens; and
wherein a device that moves the object and the imaging train consisting of the x-ray source, refractive x-ray lens and detector relative to each other so that the object is imaged over range of angles around an axis through the object perpendicular to the optical axis defined by the centers of the source, compound refractive lens and detector;
an image memory that combines said detector data signals resulting from said movement to form an image database which contains information sufficient to form a cross-sectional image of a cutting plane of the object.
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27. A device for tomographically imaging objects comprising:
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a compound refractive lens for x-rays having a focal length f;
a source that emits x-rays that then pass through the object to be imaged, wherein the divergence of x rays transmitted through each point in the object within the field of view is sufficient to fill 20% or more of the aperture of the compound refractive lens;
an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-ray s from said x-ray source that are directed toward said compound refractrive lens; and
wherein a means of moving the object and imaging train, consisting of the source, refractive lens and detector, relative to each other so that the optical axis defined by the centers of the source, lens and detector precesses around a chosen axis through the object not perpendicular to the optical axis, allowing the visualization of planes in the object perpendicular to the chosen axis. an image memory that combines said detector data signals resulting from said precession to form an image database which contains information sufficient to form a cross-sectional image of a cutting plane of the object.
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28. An x-ray microscope for imaging an object, comprising:
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a compound refractive lens for x-rays having a focal length f;
an x-ray source, selected from the group consisting of an x-ray tube and a plasma x-ray source, which is oriented to direct x rays toward said compound refractive lens;
a reflective x-ray optic that collects x rays from the source and redirects said x rays toward the center of said compound refractive lens with a local angular divergence to the x-ray pattern from each point on the optic sufficient to fill at least 20% of the aperture of said compound refractive lens. an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector system further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;
wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and
wherein
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Specification