Semiconductor acceleration sensor device and method for manufacturing the same
First Claim
Patent Images
1. A semiconductor acceleration sensor device comprising:
- an acceleration sensor chip that includes;
a weight part, a support part which flexibly supports the weight part, one end of the support part being connected to the weight part, a pedestal part surrounding the weight part, an opposite end of the support part being connected to the pedestal part, and a stress detecting element which detects a stress from deformation caused in the support part due to an acceleration;
an elastic first resin part to coat the weight part and the support part; and
a second resin part to seal the first resin part and the acceleration sensor chip.
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Abstract
Although a weight part of an acceleration sensor chip fixed on a die pad is coated with a gelatinous resin part of low elasticity, the weight part is easily displaced by an external acceleration. Thus, an acceleration can be detected with accuracy. Furthermore, long-term reliability equal to those of regular resin packages is ensured because those portions of an acceleration sensor device which are not used for acceleration sensing are sealed with a resin part.
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Citations
13 Claims
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1. A semiconductor acceleration sensor device comprising:
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an acceleration sensor chip that includes;
a weight part, a support part which flexibly supports the weight part, one end of the support part being connected to the weight part, a pedestal part surrounding the weight part, an opposite end of the support part being connected to the pedestal part, and a stress detecting element which detects a stress from deformation caused in the support part due to an acceleration;
an elastic first resin part to coat the weight part and the support part; and
a second resin part to seal the first resin part and the acceleration sensor chip. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacturing a semiconductor acceleration sensor device comprising:
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preparing an acceleration sensor chip that includes;
a weight part, a support part which flexibly supports the weight part, one end of the support part being connected to the weight part, a pedestal part surrounding the weight part, an opposite end of the support part being connected to the pedestal part, and a stress detecting element which detects a stress from deformation caused in the support part due to an acceleration;
injecting an elastic first resin part to coat the support part and the weight part; and
sealing the first resin part and the acceleration sensor chip with a second resin part. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification