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Dynamic test pattern composition for image-analysis based automatic machine diagnostics

  • US 20050286742A1
  • Filed: 06/28/2004
  • Published: 12/29/2005
  • Est. Priority Date: 06/28/2004
  • Status: Active Grant
First Claim
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1. A method for dynamic test pattern generation, including the steps of:

  • automatically selecting a set of test targets as a function of the probability of possible defects and machine performance data and to maximize an optimization criteria; and

    placing the set of test targets on a digital test pattern.

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