Manufacturing method for magnetic sensor and lead frame therefor
First Claim
1. A magnetic sensor comprising:
- a first magnetic sensor chip sensitive to components of magnetism in two sensing directions respectively; and
a second magnetic sensor chip sensitive to components of magnetism in a single sensing direction, which crosses at an acute angle to a plane defined by the two sensing directions of the first magnetic sensor chip.
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Accused Products
Abstract
A magnetic sensor is constituted using magnetic sensor chips mounted on stages supported by interconnecting members and a frame having leads in a lead frame. Herein, the stages are inclined upon plastic deformation of the interconnecting members. When the frame is held in a metal mold and the stages are pressed, the interconnecting members are elastically deformed, so that the magnetic sensor chips are bonded onto the stages placed substantially in the same plane and are then wired with the leads. Thereafter, the stages are released from pressure, so that the interconnecting members are restored from the elastically deformed states thereof. When the magnetic sensor chips are combined together to realize three sensing directions, it is possible to accurately measure three-dimensional bearings of magnetism, and the magnetic sensor can be reduced in dimensions and manufactured with a reduced cost thereof.
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Citations
6 Claims
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1. A magnetic sensor comprising:
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a first magnetic sensor chip sensitive to components of magnetism in two sensing directions respectively; and
a second magnetic sensor chip sensitive to components of magnetism in a single sensing direction, which crosses at an acute angle to a plane defined by the two sensing directions of the first magnetic sensor chip. - View Dependent Claims (4)
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2. A magnetic sensor comprising:
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a first magnetic sensor chip sensitive to components of magnetism in a first sensing direction;
a second magnetic sensor chip sensitive to components of magnetism in a second sensing direction that crosses the first sensing direction; and
a third magnetic sensor chip sensitive to components of magnetism in a third sensing direction that crosses a plane defined by the first and second sensing directions.
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3. A magnetic sensor comprising:
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a first magnetic sensor chip sensitive to components of magnetism in two sensing directions defining a first plane; and
a second magnetic sensor chip sensitive to components of magnetism in two sensing directions defining a second plane, wherein the first plane crosses the second plane.
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5. A sensor device comprising:
a pair of magnetic sensor chips, which are respectively inclined with an acute angle therebetewen and which are horizontally arranged on a board.
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6. A sensor device comprising:
a pair of magnetic sensor chips, which are respectively inclined with an acute angle therebetween and which are arranged vertically with respect to a board.
Specification