Micromachined fluidic device and method for making same
First Claim
1. A fluid-flow device (100;
-
400;
500) comprising a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34) covering at least part of said support wafer (36), and a layer of single-crystal or polycrystalline silicon (32) covering said layer of insulating material (34) and covered by said closure wafer (20), said closure wafer (20) and/or said silicon layer (32) being machined so as to define between said closure wafer (20) and said silicon layer (32) a cavity (38) to be filled with liquid, said support wafer (36) having at least one duct (102;
412, 412′
) passing right through it, and said layer of insulating material (34) being made of silicon oxide and having at least one zone that is entirely free from material (35) placed at least in line with said duct (102;
412, 412′
) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32) that responds to pressure of the liquid in said cavity (38) by moving reversibly towards said support wafer (36).
1 Assignment
0 Petitions
Accused Products
Abstract
The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The closure wafer (20) and/or said silicon layer (32) are machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said support wafer (36) has at least one duct (102) passing right through it, said layer of insulating material (34) presenting at least one zone (35) that is entirely free of material placed at least in line with said duct (102) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32), the moving member being suitable under the pressure of liquid in said cavity (38) for reversibly moving towards said support wafer (36) until contact is made between said moving member (40) and said support wafer (36).
34 Citations
38 Claims
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1. A fluid-flow device (100;
-
400;
500) comprising a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34) covering at least part of said support wafer (36), and a layer of single-crystal or polycrystalline silicon (32) covering said layer of insulating material (34) and covered by said closure wafer (20),said closure wafer (20) and/or said silicon layer (32) being machined so as to define between said closure wafer (20) and said silicon layer (32) a cavity (38) to be filled with liquid, said support wafer (36) having at least one duct (102;
412, 412′
) passing right through it, andsaid layer of insulating material (34) being made of silicon oxide and having at least one zone that is entirely free from material (35) placed at least in line with said duct (102;
412, 412′
) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32) that responds to pressure of the liquid in said cavity (38) by moving reversibly towards said support wafer (36). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
400;
-
12. A liquid inlet control member (100;
-
100′
;
100″
;
100′
″
) forming a non-return check valve, the member comprising a stack (30) covered in a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34) covering at least part of said support wafer (36), and a layer of single-crystal or polycrystalline silicon (32) covering said layer of insulating material (34) and covered by said closure wafer (20),said closure wafer (20) and/or said silicon layer (32) being machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said cavity (38) being designed to be filled with liquid and presenting at least one gap (104;
1041;
1042) machined in the entire thickness of the silicon layer (32),said support wafer (36) having at least one liquid inlet duct (102) passing right through it and situated at least in register with said cavity (38), and said layer of insulating material (34) having at least one zone (35) entirely free of material extending at least in line with said duct (102) and said gap (104;
1041;
1042) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32) to form a flap for said valve, a portion of said silicon layer (32) surrounding said moving member (40) presenting elasticity making it possible in the event of a difference in liquid pressure between said liquid inlet duct (102) and said cavity (38) to allow said moving member (40) to move reversibly towards said support wafer (36). - View Dependent Claims (13, 14, 15, 16, 24)
-
100′
-
17. A liquid pressure detection member (400) comprising a stack (30) covering a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34) covering at least part of said support wafer (36), and a layer of single-crystal or polycrystalline silicon (32) covering said layer of insulating material (34) and covered by said closure wafer (20), said closure wafer (20) and/or said silicon layer (32) being machined so as to define a cavity (38) for filling with liquid between said closure wafer (20) and said silicon layer (32),
said support wafer (36) having as least one duct (412, 412′ - ) passing right through it and situated in register with said cavity (38), and
said layer of insulating material (34) having at least one zone (35) that is entirely free of material placed at least in line with said duct (412, 412′
) so as to co-operate with said cavity (38) to define a moving member (40) in said layer of silicon (32), said silicon support wafer (36) presenting a portion (414) in register with the moving member (40) forming an island that is separated from the remainder of the support wafer (36) by said duct (412′
), said moving member (40) being capable, by virtue of its elasticity and under pressure of liquid in said cavity (38), of moving reversibly towards the support wafer (36). - View Dependent Claims (18, 19, 20, 25)
- ) passing right through it and situated in register with said cavity (38), and
-
21. A micropump comprising a stack (30) covered in a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34) covering at least part of said support wafer (36), and a layer of single-crystal or polycrystalline silicon (32) covering said layer of insulating material (34) and covered by said closure wafer (20),
said closure wafer (20) and/or said silicon layer (32) being machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), the cavity being for filling with liquid and including a pump chamber (504), said support wafer (36) comprising at least a first duct (102, 508, 412, 412′ - , 204) passing right through it and situated in register with said cavity (38),
said layer of insulating material (34) having at least one first zone (351) that is entirely free of material placed at least in line with said first duct (102, 508, 412, 412′
, 204) so as to co-operate with said cavity (38) to define a first moving member (40) in said silicon layer (32), the first moving member being suitable under pressure of liquid in said pump chamber (504) for moving reversibly towards said support wafer (36), said first moving member (40) forming part of the flap of a liquid inlet control member (100), andsaid micropump further comprising a pumping portion (502) comprising control means fitted with a pump diaphragm (506) to cause the volume of the pump chamber (504) to vary periodically, and liquid outlet control means (100). - View Dependent Claims (22, 23, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
- , 204) passing right through it and situated in register with said cavity (38),
Specification