Electro-optical measurement of hysteresis in interferometric modulators
First Claim
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1. A method of testing a plurality of interferometric modulators, comprising:
- applying a triangular voltage waveform to the interferometric modulators; and
detecting reflectivity of light from the interferometric modulators.
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Abstract
Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the resulting reflectivity from the modulators.
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Citations
38 Claims
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1. A method of testing a plurality of interferometric modulators, comprising:
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applying a triangular voltage waveform to the interferometric modulators; and
detecting reflectivity of light from the interferometric modulators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of determining electrical parameters for driving a plurality of inteferometric modulators, comprising:
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applying a time-varying voltage stimulus to the interferometric modulators;
detecting reflectivity of light from the interferometric modulators; and
determining one or more electrical parameters from said reflectivity of light in response to said time-varying voltage stimulus, the electrical parameters indicative of electrical parameters sufficient to cause a change in state of the interferometric modulators. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method of testing a plurality of interferometric modulator structures, comprising:
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applying a time-varying voltage waveform to the interferometric modulators;
detecting reflectivity of light from the interferometric modulators;
determining reflectivity of light as a function of voltage; and
identifying the plurality of interferometric modulators as of sufficient quality for use in a display based on said determining. - View Dependent Claims (20, 21, 22)
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23. A system for testing a plurality of interferometric modulators, comprising:
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an illumination source adapted to provide incident light to a plurality of interferometric modulators;
a voltage source adapted to apply enough voltage to the interferometric modulators so as to change their state; and
an optical detector adapted to detect light reflected from the plurality of interferometric modulators. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A method of testing a plurality of inteferometric modulators, comprising:
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applying a time-varying voltage waveform to the interferometric modulators;
detecting reflectivity of light from the interferometric modulators;
repeating said applying and detecting steps one or more times;
averaging at least a portion of the detected reflectivity; and
determining one or more electrical parameters from said averaged reflectivity.
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34. A method of testing a color interferometric modulator display, the display comprising a plurality of sub-pixel types, each sub-pixel type corresponding to a different color, the method comprising:
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applying a time-varying voltage waveform to one sub-pixel type;
detecting reflectivity of light from said sub-pixel type;
determining one or more electrical parameters from said detecting; and
repeating said applying, detecting, and determining steps for another sub-pixel type.
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35. A method of testing a plurality of interferometric modulators, comprising:
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a means for applying a time-varying voltage waveform to the interferometric modulators;
a means for detecting reflectivity of light from the interferometric modulators; and
a means for determining one or more parameters based on said detected reflectivity. - View Dependent Claims (36, 37, 38)
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Specification