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Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator

  • US 20060077528A1
  • Filed: 08/05/2005
  • Published: 04/13/2006
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A microelectromechanical system, comprising:

  • a conductor layer;

    a mechanical layer separated by a cavity from the conductor layer and configured to move relative to the conductor layer; and

    a charged layer comprising an incorporated charged species, the charged layer disposed between the conductor layer and the mechanical layer.

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