Alignment stage apparatus
First Claim
1. An alignment stage apparatus including a base structure and a movable stage which can move along a surface of said base structure so as not to be in contact with said base structure, said apparatus comprising:
- a plurality of power transmission coils buried under the surface of said base structure;
a power reception coil attached to said movable stage to oppose the surface;
switching means for sequentially switching, of said plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of said movable stage; and
power feeding means for supplying AC power to said power transmission coils to be energized through said switching means.
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Abstract
An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.
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Citations
11 Claims
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1. An alignment stage apparatus including a base structure and a movable stage which can move along a surface of said base structure so as not to be in contact with said base structure, said apparatus comprising:
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a plurality of power transmission coils buried under the surface of said base structure;
a power reception coil attached to said movable stage to oppose the surface;
switching means for sequentially switching, of said plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of said movable stage; and
power feeding means for supplying AC power to said power transmission coils to be energized through said switching means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification