Backside silicon wafer design reducing image artifacts from infrared radiation
First Claim
Patent Images
1. An imager comprising:
- an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of a substrate, said pixel cells including imaging pixel cells and dark current pixel cells; and
a layer formed on a second surface of said substrate for reducing the amount of light reflecting from said second surface back to said dark current pixel cells.
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Accused Products
Abstract
Imaging devices having reduced image artifacts are disclosed. The image artifacts in the imaging devices are reduced by redirecting, absorbing or scattering IR radiation that passes through the imaging device substrate away from dark pixels.
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Citations
59 Claims
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1. An imager comprising:
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an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of a substrate, said pixel cells including imaging pixel cells and dark current pixel cells; and
a layer formed on a second surface of said substrate for reducing the amount of light reflecting from said second surface back to said dark current pixel cells. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An imager comprising:
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a substrate having a first surface and a second surface; and
an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of a substrate, said pixel cells including imaging pixel cells and dark current pixel cells;
wherein said second surface has surface abrasions formed therein for reducing the amount of light reflecting from said second surface back to said dark current pixel cells. - View Dependent Claims (17, 18, 19, 20)
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21. An imager comprising:
an array of pixel sensor cells comprising a plurality of active pixel cells and dark current pixel cells formed at a first surface of a substrate, wherein said active pixel cells and said dark current pixel cells are separated in said substrate by a predetermined distance. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. A processor system comprising:
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an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of a substrate, said pixel cells including imaging pixel cells and dark current pixel cells; and
a layer formed on a second surface of said substrate for reducing the amount of light reflecting from said second surface back to said dark current pixel cells; and
a processor for receiving and processing data representing the image. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A processor system comprising:
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a substrate having a first surface and a second surface;
an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of a substrate, said pixel cells including imaging pixel cells and dark current pixel cells;
wherein said second surface has surface abrasions formed therein for reducing the amount of light reflecting from said second surface back to said dark current pixel cells; and
a processor for receiving and processing data representing the image. - View Dependent Claims (41, 42, 43, 44, 45)
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46. A processor system comprising:
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an array of pixel sensor cells comprising a plurality of active pixel cells and dark pixel cells formed at a first surface of a substrate, wherein said active pixel cells and said dark pixel cells are separated in said substrate by a predetermined distance; and
a processor for receiving and processing data representing the image. - View Dependent Claims (47, 48, 49, 50)
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51. A method of reducing image artifacts in an imaging device, said method comprising the steps of:
minimizing the amount of IR radiation that penetrates the substrate of the imaging device and reflects to dark pixels in said imaging device to reduce image artifacts in said imager. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59)
Specification