Nanoelectronic sensor with integral suspended micro-heater
First Claim
1. A nanoelectronic sensing device having a sensitivity for at least one analyte of interest, comprising:
- a substrate, a nanostructure element disposed adjacent the substrate; and
at least one conductive element electrically connected to the nanostructure element;
wherein the device is configured to heat at least a portion of the sensor structure including the nanostructure element.
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Accused Products
Abstract
A nanoelectronic sensing device includes a substrate, a nanostructure element disposed adjacent the substrate, and at least a conductive element electrically connected to the nanostructure element. The device is configured to heat at least a portion of the sensor structure including the nanostructure element. In certain embodiments, the nanostructure element comprises at least one nanotube, the nanotube being electrically connected to at least two conductors so as to permit an electric current on the order of 10 microAmps or greater to be passed through the nanotube, causing the nanotube to heat up relative to the substrate. In alternative embodiments, the sensing device includes a platform or membrane which is at least partially thermally isolated by one or more cavities, the platform supporting at least the nanostructure element adjacent to a microheater element. The heating of the sensor structure may be employed, for example, for thermoregulation, to accelerate and/or increase sensor response, and to improve other sensor characteristics.
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Citations
19 Claims
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1. A nanoelectronic sensing device having a sensitivity for at least one analyte of interest, comprising:
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a substrate, a nanostructure element disposed adjacent the substrate; and
at least one conductive element electrically connected to the nanostructure element;
wherein the device is configured to heat at least a portion of the sensor structure including the nanostructure element. - View Dependent Claims (2, 3)
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4. Methods, devices, assemblies, subassemblies, kits, and software products substantially in the spirit of the inventive embodiments described herein.
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5. A transistor device;
- comprising;
a microhotplate including;
a substrate having a bulk portion and a suspended portion, the suspended portion connected to the bulk portion so as to be substantially thermally isolated from the bulk portion;
at least one heating element disposed adjacent the suspended portion;
a transistor including;
a semiconducting channel comprising one or more nanostructure elements, the channel disposed adjacent the suspended portion and configured so as to be heated by the heating element;
at least a pair of contacts electrically communicating with the channel;
at least one gate electrode configured to electrically influence the channel. - View Dependent Claims (6, 7, 8, 9)
- comprising;
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10. A sensor device for sensing at least an analyte of interest;
- comprising;
a microhotplate including;
a substrate having a bulk portion and a suspended portion, the suspended portion connected to the bulk portion so as to be substantially thermally isolated from the bulk portion;
at least one heating element disposed adjacent the suspended portion;
a nanosensor including;
at least one nanostructure element disposed adjacent the suspended portion and configured so as to be heated by the heating element;
one or more contacts configured to electrically communicate with the nanostructure element;
a recognition material disposed in operative association with the nanostructure element and configured to interact with the analyte of interest. - View Dependent Claims (11)
- comprising;
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12. A sensor device for sensing at least an analyte of interest, comprising:
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a substrate, at least one elongate nanostructure element having a conductivity and disposed adjacent the substrate, wherein at least a portion of the elongate nanostructure element is space apart from the substrate;
one or more conductive elements electrically connected to the nanostructure element and configured to permit an electrical current to be conducted along the elongate nanostructure element so as to dissipate energy as heat in at least a portion of the elongate nanostructure element; and
a recognition material disposed in operative association with the nanostructure element and configured to interact with the analyte of interest. - View Dependent Claims (13, 14, 15)
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16. A transistor device, comprising:
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a substrate;
at least one elongate nanostructure element having a conductivity and disposed adjacent the substrate, wherein at least a portion of the elongate nanostructure element is space apart from the substrate;
one or more conductive elements electrically connected to the nanostructure element and configured to permit an electrical current to be conducted along the elongate nanostructure element so as to dissipate energy as heat in at least a portion of the elongate nanostructure element; and
a gate electrode disposed to electrically influence the elongate nanostructure element. - View Dependent Claims (17, 18, 19)
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Specification