×

High fill ratio silicon spatial light modulator

  • US 20070097487A1
  • Filed: 06/05/2006
  • Published: 05/03/2007
  • Est. Priority Date: 10/28/2005
  • Status: Active Grant
First Claim
Patent Images

1. An optical deflection device for a display application, the optical deflection device comprising:

  • a semiconductor substrate comprising an upper surface region;

    one or more electrode devices provided overlying the upper surface region;

    a hinge device comprising a silicon material and coupled to the upper surface region;

    a spacing defined between the upper surface region and the hinge device; and

    a mirror structure comprising;

    a post portion coupled to the hinge device, and a mirror plate portion coupled to the post portion and overlying the hinge device.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×