Method and apparatus for electronic cancellation of quadrature error
First Claim
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1. A method for detecting a rate of rotation, the method comprising:
- vibrating a proof mass at a pre-determined frequency in a drive axis;
in response to a rotation, sensing an amount of deflection of the proof mass in an axis orthogonal to the drive axis, the amount of deflection being sensed as a change in charge; and
generating a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge, including capacitively coupling the quadrature error cancellation signal to the sensed change in charge to substantially cancel quadrature error from the sensed change in charge.
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Abstract
Methods and apparatus are provided for detecting a rate of rotation. In one implementation, the method includes vibrating a proof mass at a pre-determined frequency in a drive axis. In response to a rotation, sensing an amount of deflection of the proof mass in an axis orthogonal to the drive axis, in which the amount of deflection is sensed as a change in charge. The method further includes generating a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge.
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Citations
19 Claims
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1. A method for detecting a rate of rotation, the method comprising:
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vibrating a proof mass at a pre-determined frequency in a drive axis;
in response to a rotation, sensing an amount of deflection of the proof mass in an axis orthogonal to the drive axis, the amount of deflection being sensed as a change in charge; and
generating a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge, including capacitively coupling the quadrature error cancellation signal to the sensed change in charge to substantially cancel quadrature error from the sensed change in charge. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9)
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2. (canceled)
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10. A sensor operable to detect a rate of rotation, the sensor comprising:
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a proof mass;
a drive circuit to vibrate the proof mass at a pre-determined frequency in a drive axis;
an electrode operable to sense an amount of deflection of the proof mass in an axis orthogonal to the drive axis in response to a rotation of the sensor, the electrode sensing the amount of deflection as a change in charge; and
a quadrature error cancellation circuit operable to generate a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge. wherein the quadrature error cancellation signal is capacitively coupled to the sensed change in charge to substantially cancel quadrature error from the sensed change in charge. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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11. (canceled)
Specification